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Award Abstract #0103390
NER: Ultrafast Laser-Assisted Scanning Probe Fabrication of Nanostructues

| NSF Org: |
CBET
Division of Chemical, Bioengineering, Environmental, and Transport Systems
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| Initial Amendment Date: |
July 10, 2001 |
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| Latest Amendment Date: |
July 5, 2002 |
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| Award Number: |
0103390 |
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| Award Instrument: |
Standard Grant |
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| Program Manager: |
Farley Fisher
CBET Division of Chemical, Bioengineering, Environmental, and Transport Systems
ENG Directorate for Engineering
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| Start Date: |
July 15, 2001 |
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| Expires: |
December 31, 2002 (Estimated) |
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| Awarded Amount to Date: |
$100000 |
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| Investigator(s): |
Costas Grigoropoulos cgrigoro@me.berkeley.edu (Principal Investigator)
Kyriakos Komvopoulos (Co-Principal Investigator)
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| Sponsor: |
University of California-Berkeley
Sponsored Projects Office
BERKELEY, CA 94704 510/642-8109
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| NSF Program(s): |
COMBUSTION, FIRE, & PLASMA SYS, THERMAL TRANSPORT PROCESSES
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| Field Application(s): |
0308000 Industrial Technology
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| Program Reference Code(s): |
MANU, 9147, 1676
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| Program Element Code(s): |
1407, 1406
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ABSTRACT

Basic exploratory research is performed on nanoscale surface engineering through means of ultra-fast, pulsed laser radiation coupled with near-field scanning probe microscopy. A new experimental apparatus consisting of a femtosecond laser source coupled with a scanning AFM/STM system is used for this purpose. Depending on the process parameters, high-definition nanomachining and nanodeposition can be achieved. The effects of the laser intensity distribution, wavelength, and polarization are examined in relation to the sample/probe tip material parameters. The integrity, durability, mechanical, chemical and electrical structural properties of the produced nanofeatures are characterized by various micro-analytical techniques. The long-term objective is the development of functional relationships between key process parameters, patterning features, and material properties of the modified surfaces that will enable nanostructure optimization.
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