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Award Abstract #0209556
NER: Development of a Novel Low Cost Nano-lithography Technique using a Nanometric High Transmission Optical Antenna
| NSF Org: |
CMMI
Division of Civil, Mechanical, and Manufacturing Innovation
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| Initial Amendment Date: |
July 24, 2002 |
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| Latest Amendment Date: |
July 24, 2002 |
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| Award Number: |
0209556 |
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| Award Instrument: |
Standard Grant |
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| Program Manager: |
Kevin Lyons
CMMI Division of Civil, Mechanical, and Manufacturing Innovation
ENG Directorate for Engineering
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| Start Date: |
July 15, 2002 |
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| Expires: |
June 30, 2003 (Estimated) |
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| Awarded Amount to Date: |
$100000 |
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| Investigator(s): |
Xianfan Xu xxu@ecn.purdue.edu (Principal Investigator)
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| Sponsor: |
Purdue University
Young Hall
West Lafayette, IN 47907 765/494-4600
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| NSF Program(s): |
NANOSCALE: EXPLORATORY RSRCH,
THERMAL TRANSPORT PROCESSES
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| Field Application(s): |
0308000 Industrial Technology
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| Program Reference Code(s): |
MANU, 9146, 1788, 1676, 1406
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| Program Element Code(s): |
1676, 1406
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ABSTRACT
This project was received in response to Nanoscale Science and Engineering initiative, NSF 01-157, category NER. The objective of this project is to develop a novel low cost nano-lithography technique. Conventional nano-manufacturing equipment, using electron beams or other radiation sources and operating in vacuum, costs well above $1,000,000. In contrary, this technique is based on a laser device and its accessories; its total cost will be less than $100,000. The key component in this nano-lithography system is a nanometric optical antenna capable of transmitting an incoming micrometer size laser beam into a nanometer size domain with high transmissivity (efficiency). This nano-lithography system can be further developed into a parallel manufacturing system, so that the time needed for the manufacturing process can be significantly reduced compared with other techniques.
With the rapid progress in nano-technology, it is crucial to develop low cost manufacturing techniques with high throughput. Only with rapid and low cost manufacturing techniques could the nano-technology translate itself from research to industry, and to impact the society. The success of this work will provide a low cost nano-lithography technique for nano-manufacturing. This research will also provide training to undergraduate and graduate students, including underrepresented groups. The results of this research will be broadly disseminated.
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