Shaochen Chen
CMMI Division of Civil, Mechanical, and Manufacturing Innovation
ENG Directorate for Engineering
Start Date:
August 1, 2002
Expires:
December 31, 2008 (Estimated)
Awarded Amount to Date:
$1000000
Investigator(s):
M. Pinar Menguc menguc@engr.uky.edu (Principal Investigator)
Robert Vallance (Former Principal Investigator)
Kazi Javed (Co-Principal Investigator) Apparao Rao (Co-Principal Investigator)
M. Pinar Menguc (Former Co-Principal Investigator)
Sponsor:
University of Kentucky Research Foundation
201 Kinkead Hall
Lexington, KY 40506 859/257-9420
NSF Program(s):
EXP PROG TO STIM COMP RES, NANOSCALE: INTRDISCPL RESRCH T
Field Application(s):
0308000 Industrial Technology
Program Reference Code(s):
MANU, 9150, 9146, 1788
Program Element Code(s):
9150, 1674
ABSTRACT
This proposal was received in response to Nanoscale Science and Engineering Initiative, NSF 01-157, category NIRT. Our interdisciplinary team is investigating a new process for nanoscale machining employing field emission of electrons from carbon nanotubes. High-precision nanomachining will be obtained by the concentrated thermal power transmitted by electron beams to a thin-film workpiece. In order to investigate the nanomachining process, we will develop a staggered probe that integrates multiple carbon nanotubes on a single probe for integrated nanometrology by scanning probe microscopy and nanomachining by field emission. Such probes will enable the experimental demonstration and investigation of nanomachining with field emission from nanotubes.
This research will demonstrate a new high-precision manufacturing process for producing nano-scale patterns that will impact many disciplines such as nanoelectronics, nanoscience, biology, and energy. The research will foster a multi-university, interdisciplinary partnership in the areas of precision manufacturing, nanoscale thermal sciences, solid-state physics, and material science. A broad set of educational and outreach activities will include nanotechnology
workshops chemistry and pre-engineering students at Kentucky State University (KSU) and a summer microscopy fellowship for KSU minority students at the University of Kentucky's microscopy facility.
PUBLICATIONS PRODUCED AS A RESULT OF THIS RESEARCH
AuBuchon, JF; Chen, LH; Gapin, AI; Jin, S. "Opening of aligned carbon nanotube ends via room-temperature sputter etching process," JOURNAL OF APPLIED PHYSICS, v.97, 2005.
AuBuchon, JF; Chen, LH; Gapin, AI; Jin, SH. "Electric-field-guided growth of carbon nanotubes during DC plasma-enhanced CVD," CHEMICAL VAPOR DEPOSITION, v.12, 2006, p. 370-374.
AuBuchon, JF; Chen, LH; Gapin, AI; Kim, DW; Daraio, C; Jin, SH. "Multiple sharp bendings of carbon nanotubes during growth to produce zigzag morphology," NANO LETTERS, v.4, 2004, p. 1781-1784.
AuBuchon, JF; Chen, LH; Jin, SH. "Control of carbon capping for regrowth of aligned carbon nanotubes," JOURNAL OF PHYSICAL CHEMISTRY B, v.109, 2005, p. 6044-6048.
AuBuchon, JF; Daraio, C; Chen, LH; Gapin, AI; Jin, SH. "Iron silicide root formation in carbon nanotubes grown by microwave PECVD," JOURNAL OF PHYSICAL CHEMISTRY B, v.109, 2005, p. 24215-24219.
B. Wong, M.P. Menguc, R. Vallance, and A. Rao. "Modeling of Energy Transfer for Carbon Nanotube-Based Precision Machining," Proceedings of the Annual Meeting of the American Physical Society (APS). Austin, TX. March 3-7, 2003., 2003, p. na.
Bandaru, PR; Daraio, C; Jin, S; Rao, AM. "Novel electrical switching behaviour and logic in carbon nanotube Y-junctions," NATURE MATERIALS, v.4, 2005, p. 663-666.
Chen, IC; Chen, LH; Orme, C; Quist, A; Lal, R; Jin, SH. "Fabrication of high-aspect-ratio carbon nanocone probes by electron beam induced deposition patterning," NANOTECHNOLOGY, v.17, 2006, p. 4322-4326.
Chen, IC; Chen, LH; Orme, CA; Jin, S. "Control of curvature in highly compliant probe cantilevers during carbon nanotube growth," NANO LETTERS, v.7, 2007, p. 3035-3040.
Chen, IC; Chen, LH; Ye, XR; Daraio, C; Jin, S; Orme, CA; Quist, A; Lal, R. "Extremely sharp carbon nanocone probes for atomic force microscopy imaging," APPLIED PHYSICS LETTERS, v.88, 2006.
Chen, LH; AuBuchon, JF; Gapin, A; Daraio, C; Bandaru, P; Jin, S; Kim, DW; Yoo, IK; Wang, CM. "Control of carbon nanotube morphology by change of applied bias field during growth," APPLIED PHYSICS LETTERS, v.85, 2004, p. 5373-5375.
Chen, LH; Jin, S. "Packaging of nanostructured microelectromechanical systems microtriode devices," JOURNAL OF ELECTRONIC MATERIALS, v.32, 2003, p. 1360-1365.
D. ?W. Kim, L. -H. Chen, J. F. AuBuchon, I.-C. Chen, S. ?H. Jeong, I. K. Yoo, S. Jin. "Prevention of Si-contaminated nanocone formation during plasma enhanced chemical vapor deposition growth of carbon nanotubes," Carbon, v.43, 2005, p. 835.
Daraio, C; Nesterenko, VF; Jin, S; Wang, W; Rao, AM. "Impact response by a foamlike forest of coiled carbon nanotubes," JOURNAL OF APPLIED PHYSICS, v.100, 2006.
Gai, PL; Stephan, O; McGuire, K; Rao, AM; Dresselhaus, MS; Dresselhaus, G; Colliex, C. "Structural systematics in boron-doped single wall carbon nanotubes," JOURNAL OF MATERIALS CHEMISTRY, v.14, 2004, p. 669-675.
Gai, Stephan, McGuire, Rao, Dresselhaus, Dresselhaus, and Colliex.. "Structural Systematics in Boron-Doped Single Wall Carbon Nanotubes," Jrnl. of Mater. Chem., v.14, 2004, p. 669.
Gopal, V; Radmilovic, VR; Daraio, C; Jin, S; Yang, PD; Stach, EA. "Rapid prototyping of site-specific nanocontacts by electron and ion beam assisted direct-write nanolithography," NANO LETTERS, v.4, 2004, p. 2059-2063.
Gothard, Daraio, Jaillard, Zidan, Jin, and Rao.. ""Controlled Growth of Y-Junction Nanotubes Using Ti-Doped Vapor Catalyst"," Nano Letters, v.4, 2004, p. 213.
Gothard, N; Daraio, C; Gaillard, J; Zidan, R; Jin, S; Rao, AM. "Controlled growth of Y-junction nanotubes using Ti-doped vapor catalyst," NANO LETTERS, v.4, 2004, p. 213-217.
Hii, KF; Vallance, RR; Chikkamaranahalli, SB; Menguc, MP; Rao, AM. "Characterizing field emission from individual carbon nanotubes at small distances," JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.24, 2006, p. 1081-1087.
Joseph F. AuBuchon, Li-Han Chen, Sungho Jin. "Re-Growth of Aligned Carbon Nanotubes via Control of Carbon Capping," J. Phys. Chem., v.B109, 2005, p. 6044.
Keskar, G; Rao, R; Luo, J; Hudson, J; Chen, J; Rao, AM. "Growth, nitrogen doping and characterization of isolated single-wall carbon nanotubes using liquid precursors," CHEMICAL PHYSICS LETTERS, v.412, 2005, p. 269-273.
Kichambare, P; Hii, KF; Vallance, RR; Sadanadan, B; Rao, AM; Javed, K; Menguc, MP. "Growth of tungsten oxide nanorods with carbon caps," JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.6, 2006, p. 536-540.
Kim, DW; Chen, LH; AuBuchon, JF; Chen, IC; Jeong, SH; Yoo, IK; Jin, S. "Prevention of Si-contaminated nanocone formation during plasma enhanced CVD growth of carbon nanotubes," CARBON, v.43, 2005, p. 835-840.
Sanchez, JA; Menguc, MP. "Geometry dependence of the electrostatic and thermal response of a carbon nanotube during field emission," NANOTECHNOLOGY, v.19, 2008.
Sanchez, JA; Menguc, MP. "Melting and vaporization of Cu and Ni films during electron-beam heating," JOURNAL OF APPLIED PHYSICS, v.103, 2008.
Sanchez, JA; Wong, BT; Menguc, MP; Albella, P. "Field emission and electron deposition profiles as a function of carbon nanotube tip geometries," JOURNAL OF APPLIED PHYSICS, v.101, 2007.
Srivastava, D; Menon, M; Daraio, C; Jin, S; Sadanadan, B; Rao, AM. "Vacancy-mediated mechanism of nitrogen substitution in carbon nanotubes," PHYSICAL REVIEW B, v.69, 2004.
Srivastava, Menon, Daraio, Jin, Sadanadan, Rao.. "Vacancy-mediated Mechanism of Nitrogren Substitution in Carbon Nanotubes".," Phys. Rev., v.B69, 2004, p. 153414.
Trinkle, C; Kichambare, P; Valiance, RR; Wong, B; Menguc, MP; Sadanadan, B; Rao, AM; Bah, A; Javed, K. "Thermal transport during nanoscale machining by field emission of electrons from carbon nanotubes," JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, v.125, 2003, p. 546-546.
Trinkle, SMith, Vallance, Wong, and Menguc. "Thermal Finite Difference Analysis of Threshold Heating for Nanoscale Machining," Proceedings of the ASME IMECE: International Mechanical Engineering Conference & Exposition. New Orleans, Louisianna. Nov. 17-22, 2002., 2002, p. na.
Trinkle, Smith, Vallance, Wong, and Menguc. "Thermal Finite Difference Analysis of Threshold Heating for Nanoscale Machining," Proceedings of the ASME IMECE: International Mechanical Engineering Conference & Exposition. New Orleans, Louisianna. Nov. 17-22, 2002., 2002, p. na.
Trinkle, Vallance, Menguc, Bah, Javed, Rao, and Jin. "Nanoprobe Concepts for Field Emission Nanomachining," Proceedings of the 17th Annual Meeting of the American Society for PRecision Engineering. St. Louis, MO. October 20-25, 2002., 2002, p. na.
Trinkle, Vallance, Menguc, Bah, Javed, Rao, and Jin. "Nanoprobe Concepts for Field Emission Nanomachining," Proceedings of the 17th Annual Meeting of the American Society for PRecision Engineering. St. Louis, MO. October 20-25, 2002., 2002, p. na.
Wong and Menguc. "Monte Carlo Methods in Radiative Transfer and Electron Beam Processing," Proceedings of Eurotherm73 on Computational Thermal Radiation in Participating Media. Mons, Belgium. April 15-17, 2003., 3, p. n.
Wong and Menguc.. "Electronic Thermal conduction in Thin Gold Films," Proceedings of the ASME Summer Heat Transfer Conference. Las Vega, NE. July 21-23, 2003., 2003, p. na.
Wong, BT; Menguc, MP. "Monte Carlo methods in radiative transfer and electron-beam processing," JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, v.84, 2004, p. 437-450.
Wong, BT; Menguc, MP; Vallance, RR. "Sequential nano-patterning using electron and laser beams: A numerical methodology," JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, v.3, 2006, p. 219-230.
Wong, BT; Menguc, MP; Vallance, RR. "Thermal conduction induced by electron-beam," INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, v.50, 2007, p. 5099-5107.
Wong, Menguc, Vallance, and Rao. "Modeling of Energy Transfer for Carbon Nanotube-Based Precision Machining," Proceedings of the Annual Meeting of the American Physical Society (APS). Austin, TX. March 3-7, 2003., 2003, p. na.
Ye, XR; Chen, LH; Wang, C; Aubuchon, JF; Chen, IC; Gapin, AI; Talbot, JB; Jin, S. "Electrochemical modification of vertically aligned carbon nanotube arrays," JOURNAL OF PHYSICAL CHEMISTRY B, v.110, 2006, p. 12938-12942.
