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Press Release 06-085
A Cool Way to Strip Hydrogen

Using lasers to clear silicon surfaces could make for cheaper, better computer chips and solar cells

Laser light proves to be a gentle way to clear hydrogen from a silicon surface.

Laser light proves to be a gentle way to clear hydrogen from a silicon surface.
Credit and Larger Version

May 18, 2006

Researchers have demonstrated a new laser-based technique for stripping hydrogen atoms from the surface of silicon, an advance that could significantly reduce the cost and improve the quality of computer chips, solar cells and a wide variety of other semiconductor devices.

The scientists' work was supported in part by the National Science Foundation, and is reported in the May 19 issue of the journal Science. The team includes Philip I. Cohen at the University of Minnesota, Leonard C. Feldman, Norman Tolk and Zhiheng Liu at Vanderbilt University, and Zhenyu Zhang from Oak Ridge National Laboratory and the University of Tennessee.

The laser technique addresses a key step in the production of microchips, which are typically built by laying down multiple layers of silicon in sequence. To keep each new surface from oxidizing, manufacturers routinely expose it to hydrogen atoms that attach to all the available silicon bonds. Then they remove the hydrogen atoms before adding the next layer. Unfortunately, their usual method--applying heat--can destroy the silicon's crystalline perfection and ruin the chip.

By stripping the hydrogen off with lasers, however, manufacturers could potentially work at much lower temperatures, which should dramatically improve yields.

For more information, see the news releases from Vanderbilt University, University of Minnesota and the University of Tennessee.

An animation of the laser process is also available.

-NSF-

Media Contacts
M. Mitchell Waldrop, NSF, (703) 292-7752, mwaldrop@nsf.gov
Deane Morrison, University of Minnesota, (612) 624-2346, morri029@umn.edu
Jay Mayfield, University of Tennessee, (865) 974-9409, jay.mayfield@tennessee.edu
David F. Salisbury, Vanderbilt University, (615) 343-6803, david.salisbury@vanderbilt.edu

Related Websites
An animation of the laser process: http://www.nsf.gov/news/longurl.cfm?id=2
The University of Minnesota news release: http://www.nsf.gov/news/longurl.cfm?id=3
The University of Tennessee news release: http://pr.tennessee.edu/news/release.asp?id=2470
The Vanderbilt University news release: http://www.vanderbilt.edu/exploration/stories/hsidesorption.html

The National Science Foundation (NSF) is an independent federal agency that supports fundamental research and education across all fields of science and engineering. In fiscal year (FY) 2014, its budget is $7.2 billion. NSF funds reach all 50 states through grants to nearly 2,000 colleges, universities and other institutions. Each year, NSF receives about 50,000 competitive requests for funding, and makes about 11,500 new funding awards. NSF also awards about $593 million in professional and service contracts yearly.

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