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Cornell Sets Record for Creating High-frequency Microresonator in Silicon


March 13, 2008

microphoto of a resonator Many researchers in microelectromechanical systems (MEMS) have focused on resonators--tiny devices that vibrate at radio frequencies--to replace quartz crystals and other oscillators and can be economically integrated directly into a silicon chip. Cornell scientists are pushing the upper limits of microresonator frequency with a device that generates a 4.5 gigahertz (GHz) signal, the highest ever achieved in silicon. Full Story

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Cornell University

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